Piezoelectric & capacitive micro & nano systems for ultrasound transducers and energy conversion

Our research focuses on the modeling, design and characterization of micro and nano objects based on MEMS (Micro-Electro-Mechanical Systems) capacitive or piezoelectric technologies. Emergent technologies based on piezoelectric thick films, ZnO nanowire devices or cMUTs (Capacitive Micromachined Ultrasonic Transducers) are covered in our work, starting with the fabrication of basic components and up to their integration in a device.

The design of these devices is carried out with the objective to optimize the choice of deposited materials, to propose innovative choices in terms of materials and / or substrates, and to study their influence on the performance of the final device. Finally, the sizes of these devices, from few hundred nanometers to several tens of millimeters, are extremely rich in terms of involved acoustic phenomena.

Several members of this research group are invested in the Piezo Institute, a European research network gathering together several academic laboratories and companies, leaders in piezoelectricity.

Projects