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Microelectronics, Technologies and Components

Equipments

  • PVD (Physical Vapour Deposition) - PLASSYS

  • PLD (Pulsed Laser Deposition) - MECA 2000        
            
  • E-beam evaporation - PLASSYS

  • Supercritical Dryer - SEPAREX

  • Cleaning wet bench - LAY CONCEPT 
            
  • Etching wet bench - LAY CONCEPT

  • H3PO4  etching wet bench - LAY CONCEPT

  • Solvent wet bench - LAY CONCEPT

  • Silicon anodization wet bench - LAY CONCEPT

  • Rapid Thermal Annealing TGZM (Thermal Gradient Zone Melting) - AET

  • UV Rapid Thermal Annealing - JIPELEC

  • High Temperature Annealing - CENTROTHERM

  • PECVD (Plasma Enhanced Chemical Vapour Deposition) - OXFORD

  • PECVD (Plasma Enhanced Chemical Vapour Deposition) - LPTS

  • LPCVD (Low Pressure Chemical Vapour Deposition) - TETREON

  • LPCVD (Low Pressure Chemical Vapour Deposition) - TETREON

  • RIE-ICP (Reactive Ion Etching – Inductive Coupled Plasma) - CORIAL     

  • IBE (Ion Beam Etching) - PLASSYS

  • Four-circle high resolution diffractometer - BRUKER

  • Spin Coater - Süss Microtec RC8

  • Spin Coater - EVG101

  • Automatic developers ATMvision Optiwet ST30

  • UV Insulator (350-450nm) - Süss Microtec MA1006

  • UV Insulator (lampe Hg 500/1000W) - EVG6200 

     


 

certem-platform

Diffractometer-certem-platform
pecvd-oxford-certem-platform
pld-certem-platform
Silicon-anodization-wet-bench-certem-platform
solvant-vet-bench-certem-platform
supercritical-dryer-separex-certem-platform
UV-insulator-certem-platform
  

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Contact


GREMAN, Site STMicroelectronics
10 rue Thalès de Milet
37071, Tours Cedex2
France

Jérôme BILLOUÉ
Phone : +33 (0) 247 42 41 72
Mail : jerome.billoue@univ-tours.fr

Administration: Magali LEGER
Phone : +33 (0) 247 42 81 33
Fax : +33 (0) 247 42 49 37 
Mail : magali.leger@univ-tours.fr
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